Statistical optimization influence on high permittivity gate spacer in 16nm DG-FinFET device / Ameer F. Rosla ... [et al.]
In this paper, the effect of high permittivity gate spacer on short channel effects (SCEs) for the 16 nm double-gate finFET is investigated, with the output responses optimized using L9 orthogonal array (OA) Taguchi method. The determination is done through Signal-to-noise ratio to the effectiveness...
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Main Authors: | , , , , , , , , , |
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Format: | Book |
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Universiti Teknologi MARA,
2022-01.
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Online Access: | Link Metadata |
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Internet
Link Metadata3rd Floor Main Library
Call Number: |
A1234.567 |
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Copy 1 | Available |