Statistical optimization influence on high permittivity gate spacer in 16nm DG-FinFET device / Ameer F. Rosla ... [et al.]

In this paper, the effect of high permittivity gate spacer on short channel effects (SCEs) for the 16 nm double-gate finFET is investigated, with the output responses optimized using L9 orthogonal array (OA) Taguchi method. The determination is done through Signal-to-noise ratio to the effectiveness...

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Bibliografiset tiedot
Päätekijät:	Rosla, Ameer F. (Tekijä), Salehuddin, F. (Tekijä), Zain, A.S.M (Tekijä), Kaharudin, K.E (Tekijä), Mohamad, N.R (Tekijä), A.H, Afifah Maheran (Tekijä), Haroon, H. (Tekijä), Razak, H.A (Tekijä), Idris, S.K (Tekijä), Ahmad, I. (Tekijä)
Aineistotyyppi:	Kirja
Julkaistu:	Universiti Teknologi MARA, 2022-01.
Aiheet:	Article PeerReviewed
Linkit:	Link Metadata
Tagit:	Lisää tagi Ei tageja, Lisää ensimmäinen tagi!

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