Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
में बचाया:
| मुख्य लेखक: | |
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| स्वरूप: | इलेक्ट्रोनिक पुस्तक अध्याय |
| प्रकाशित: |
KIT Scientific Publishing
2023
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| श्रृंखला: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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| विषय: | |
| ऑनलाइन पहुंच: | DOAB: download the publication DOAB: description of the publication |
| टैग: |
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| सारांश: | Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work. |
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| भौतिक वर्णन: | 1 electronic resource (324 p.) |
| आईएसबीएन: | KSP/1000158762 9783731513025 |
| अभिगमन: | Open Access |