Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
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| Main Author: | |
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| Format: | Electronic Book Chapter |
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KIT Scientific Publishing
2023
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| Series: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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| Summary: | Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work. |
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| Physical Description: | 1 electronic resource (324 p.) |
| ISBN: | KSP/1000158762 9783731513025 |
| Access: | Open Access |