Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen

Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...

Full description

Saved in:
Bibliographic Details
Main Author: Negara, Christian Emanuel (auth)
Format: Electronic Book Chapter
Published: KIT Scientific Publishing 2023
Series:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
Subjects:
Online Access:DOAB: download the publication
DOAB: description of the publication
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work.
Physical Description:1 electronic resource (324 p.)
ISBN:KSP/1000158762
9783731513025
Access:Open Access