Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
Guardado en:
| Autor principal: | |
|---|---|
| Formato: | Electrónico Capítulo de libro |
| Publicado: |
KIT Scientific Publishing
2023
|
| Colección: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
|
| Materias: | |
| Acceso en línea: | DOAB: download the publication DOAB: description of the publication |
| Etiquetas: |
Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!
|
| Sumario: | Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and related questions regarding the measurement function, evaluation algorithms and ambiguities as well as degrees of freedom of the solution set are examined in this work. |
|---|---|
| Descripción Física: | 1 electronic resource (324 p.) |
| ISBN: | KSP/1000158762 9783731513025 |
| Acceso: | Open Access |