Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Formatua: | Baliabide elektronikoa Liburu kapitulua |
| Hizkuntza: | ingelesa |
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Taylor & Francis
2009
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| Sarrera elektronikoa: | DOAB: download the publication DOAB: description of the publication |
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OAPEN Library: description of the publication
Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Argitaratua 2009
OAPEN Library: download the publication
OAPEN Library: description of the publication
Baliabide elektronikoa
Liburu kapitulua