Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Materyal Türü: | Elektronik Kitap Bölümü |
| Dil: | İngilizce |
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Taylor & Francis
2009
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| Online Erişim: | DOAB: download the publication DOAB: description of the publication |
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OAPEN Library: description of the publication
Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Baskı/Yayın Bilgisi 2009
OAPEN Library: download the publication
OAPEN Library: description of the publication
Elektronik
Kitap Bölümü