Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
-д хадгалсан:
Бусад зохиолчид: | Takahata, Kenichi (Засварлагч) |
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Формат: | Цахим Номын бүлэг |
Хэл сонгох: | англи |
Хэвлэсэн: |
IntechOpen
2009
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Нөхцлүүд: | |
Онлайн хандалт: | DOAB: download the publication DOAB: description of the publication |
Шошгууд: |
Шошго нэмэх
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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