Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
Wedi'i Gadw mewn:
| Awduron Eraill: | |
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| Fformat: | Electronig Pennod Llyfr |
| Iaith: | Saesneg |
| Cyhoeddwyd: |
IntechOpen
2009
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| Pynciau: | |
| Mynediad Ar-lein: | DOAB: download the publication DOAB: description of the publication |
| Tagiau: |
Ychwanegu Tag
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