Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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| 其他作者: | |
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| 格式: | 電子 Book Chapter |
| 語言: | 英语 |
| 出版: |
IntechOpen
2009
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| 主題: | |
| 在線閱讀: | DOAB: download the publication DOAB: description of the publication |
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