Microelectromechanical Systems and Devices
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...
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| Tác giả khác: | |
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| Định dạng: | Điện tử Chương của sách |
| Ngôn ngữ: | Tiếng Anh |
| Được phát hành: |
IntechOpen
2012
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| Những chủ đề: | |
| Truy cập trực tuyến: | DOAB: download the publication DOAB: description of the publication |
| Các nhãn: |
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| Tóm tắt: | The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators. |
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| Mô tả vật lý: | 1 electronic resource (494 p.) |
| số ISBN: | 1363 9789535103066 9789535161783 |
| Truy cập: | Open Access |