Microelectromechanical Systems and Devices

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...

Mô tả đầy đủ

Đã lưu trong:
Chi tiết về thư mục
Tác giả khác: Islam, Nazmul (Biên tập viên)
Định dạng: Điện tử Chương của sách
Ngôn ngữ:Tiếng Anh
Được phát hành: IntechOpen 2012
Những chủ đề:
Truy cập trực tuyến:DOAB: download the publication
DOAB: description of the publication
Các nhãn: Thêm thẻ
Không có thẻ, Là người đầu tiên thẻ bản ghi này!
Miêu tả
Tóm tắt:The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Mô tả vật lý:1 electronic resource (494 p.)
số ISBN:1363
9789535103066
9789535161783
Truy cập:Open Access