Microelectromechanical Systems and Devices

• अन्य लेखक: Islam, Nazmul (संपादक)
• स्वरूप: इलेक्ट्रोनिक पुस्तक अध्याय
• भाषा: अंग्रेज़ी
• प्रकाशित: IntechOpen 2012
• विषय: Optical physics; Electricity, electromagnetism & magnetism
• ऑनलाइन पहुंच: DOAB: download the publication; DOAB: description of the publication

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...