High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding
An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...
保存先:
| 第一著者: | |
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| フォーマット: | 電子媒体 図書の章 |
| 言語: | 英語 |
| 出版事項: |
Karlsruhe
KIT Scientific Publishing
2021
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| シリーズ: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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| 主題: | |
| オンライン･アクセス: | DOAB: download the publication DOAB: description of the publication |
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