Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...
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| Yazar: | |
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| Materyal Türü: | Elektronik Kitap Bölümü |
| Baskı/Yayın Bilgisi: |
Karlsruhe
KIT Scientific Publishing
2022
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| Seri Bilgileri: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
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| Konular: | |
| Online Erişim: | DOAB: download the publication DOAB: description of the publication |
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