High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Autor principal: Luo, Ding (auth)
Format: Electrònic Capítol de llibre
Idioma:anglès
Publicat: Karlsruhe KIT Scientific Publishing 2021
Col·lecció:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung 2
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Sumari:An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy.
Descripció física:1 electronic resource (202 p.)
ISBN:KSP/1000125427
9783731510611
Accés:Open Access