High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

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An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

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Bibliographic Details
Main Author: Luo, Ding (auth)
Format: Electronic Book Chapter
Language:English
Published: Karlsruhe KIT Scientific Publishing 2021
Series:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung 2
Subjects:
Maths for computer scientists
chromatisch
konfokal
3D Messtechnik
Mikroskopie
chromatic
confocal
3D measurement technology
microscopy
Online Access:OAPEN Library: download the publication
OAPEN Library: description of the publication
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