Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

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Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of...

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Bibliographic Details
Main Author: Kopf, Marlene (auth)
Format: Electronic Book Chapter
Published: Karlsruhe KIT Scientific Publishing 2022
Series:Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie 42
Subjects:
Mechanical engineering & materials
MEMS-Sensor
Drehratensensor
Inertialsensor
Dämpfung
Q-Faktor
MEMS sensor
gyroscope
inertial sensor
damping atmosphere
Q factor
Online Access:OAPEN Library: download the publication
OAPEN Library: description of the publication
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