Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

• Autori principali: Awang, Zaiki (Autore), Ghodgaonkar, Deepak Kumar (Autore), Baba, Noor Hasimah (Autore)
• Natura: Libro
• Pubblicazione: Institute of Research, Development and Commercialisation (IRDC), 2005.
• Soggetti: Article; PeerReviewed
• Accesso online: Link Metadata

A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...