Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba

• Autores principales: Awang, Zaiki (Autor), Ghodgaonkar, Deepak Kumar (Autor), Baba, Noor Hasimah (Autor)
• Formato: Libro
• Publicado: Institute of Research, Development and Commercialisation (IRDC), 2005.
• Materias: Article; PeerReviewed
• Acceso en línea: Link Metadata

A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafers from reflection and transmission measurements made at normal incidence using MNDT. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxia...