Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit
C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...
Enregistré dans:
| Auteurs principaux: | , , |
|---|---|
| Format: | Livre |
| Publié: |
Universiti Teknologi MARA, Sabah,
2017-01.
|
| Sujets: | |
| Accès en ligne: | Link Metadata |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|