Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata

• Autori principali: Herman, Sukreen Hana (Autore), Kimihiro, Sasaki (Autore), Tomonobu, Hata (Autore)
• Natura: Libro
• Pubblicazione: 2004.
• Soggetti: Conference or Workshop Item; PeerReviewed
• Accesso online: Link Metadata

PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and 4.2%, subst...