Investigation of doping techniques on the silicon based capacitor / Ahmad Sabirin Zoolfakar ...[et al.]

• मुख्य लेखकों: Zoolfakar, Ahmad Sabirin (लेखक), Yaacob, Ahmad Akmalhakim (लेखक), Zolkapli, Maizatul (लेखक), Zakaria, Azlan (लेखक), Abdul Wahab, Mohd Zahrin (लेखक)
• स्वरूप: पुस्तक
• प्रकाशित: UiTM Press, 2010-06.
• विषय: Article; PeerReviewed
• ऑनलाइन पहुंच: Link Metadata

This technical paper investigates the effect of doping techniques, type of dopant species and the plate size on the capacitance density of a silicon based capacitor. The substrate of the silicon wafers are highly doped using either solid source (SS) or spin-on dopant (SOD) method. Experiments are ca...