Investigation of doping techniques on the silicon based capacitor / Ahmad Sabirin Zoolfakar ...[et al.]

• Main Authors: Zoolfakar, Ahmad Sabirin (Author), Yaacob, Ahmad Akmalhakim (Author), Zolkapli, Maizatul (Author), Zakaria, Azlan (Author), Abdul Wahab, Mohd Zahrin (Author)
• Formato: Livro
• Publicado em: UiTM Press, 2010-06.
• Assuntos: Article; PeerReviewed
• Acesso em linha: Link Metadata

This technical paper investigates the effect of doping techniques, type of dopant species and the plate size on the capacitance density of a silicon based capacitor. The substrate of the silicon wafers are highly doped using either solid source (SS) or spin-on dopant (SOD) method. Experiments are ca...