Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
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| Format: | Electronic Book Chapter |
| Published: |
KIT Scientific Publishing
2023
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| Series: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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